Whymetalgate

2023年10月19日 — The main difference between the metal gate and the polysilicon gate is the resistive material and sensitivity to temperature.

Particularly, metal (most commonly aluminum – a Type III (P-type) dopant) has a tendency to disperse into (alloy with) silicon during these thermal annealing ...

This thesis examines possible metal gate materials for improving the performance of the gate stack and discusses process integration as well as improved ...

由 S Ji 著作 · 2020 · 被引用 1 次 — The metal gate cut need to develop a high aspect ratio ICP etching process to realize the process. The composition of metal gate is also very complex, each ...

2013年12月7日 — Polysi gates were favoured because the material could be easily matched to the SiO2 lattice constant, creating a no-strain, reliable structure.

2011年5月20日 — P+ poly-silicon is a reasonably good conductor. It can therefore be substituted for a metallic gate.

最新的金屬門Metal Gate 科學新聞、研究評論和學術文章。 Academic Accelerator 最完整的百科全書。